Chase 2 | etch gases
Cleanroom
Expertly Maintained Facilities
Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.
The Nanofab provides the supplies, facilities, equipment and know-how needed to accomplish your cutting-edge research.
Facilities
Approx. 12,000 sq. ft. of clean space
Class 100 in Lithography bays, Class 1000 elsewhere
Separate "Backend Lab" for post-'fab processing.
Calibrated Hotplates checked weekly, ±1°C
De-Ionized Water ≥ 18MΩ, Low-particle Nitrogen guns
Environmental sensors monitored & alarmed (especially in Lithography Bays)
Re-usable anti-static cleanroom gowns with laundry service
Many supplies provided, such as notebooks, toolboxes, chemicals, deposition source materials and other ancilliaries
Equipment
Rapid response to equipment & facilities failures
Minimized equipment downtime with high ratio of industry-experienced staff to equipment
Regular periodic maintenance
Responsive to user process needs
Equipment reservations on SignupMonkey
Process
Expert process staff to guide you in process development
Process Control on critical systems via Internship Program
Qualified processes on many etch & dep. systems
Starting Recipes and SPC Data regularly added to the NanoFab Wiki:
(Click on a bay to learn more)
User Supplies / Storage
Entryway
Hangers / Racks
Gowning Room