Chase 2 | etch gases
Cleanroom
Expertly Maintained Facilities
Our mission is to provide a top-rate research fabrication facility for micro and nano-scale processing.
The Nanofab provides the supplies, facilities, equipment and know-how needed to accomplish your cutting-edge research.
Facilities
Approx. 12,000 sq. ft. of clean space
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Class 100 in Lithography bays, Class 1000 elsewhere
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Separate "Backend Lab" for post-'fab processing.
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Calibrated Hotplates checked weekly, ±1°C
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De-Ionized Water ≥ 18MΩ, Low-particle Nitrogen guns
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Environmental sensors monitored & alarmed (especially in Lithography Bays)
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Re-usable anti-static cleanroom gowns with laundry service
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Many supplies provided, such as notebooks, toolboxes, chemicals, deposition source materials and other ancilliaries
Equipment
Rapid response to equipment & facilities failures
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Minimized equipment downtime with high ratio of industry-experienced staff to equipment
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Regular periodic maintenance
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Responsive to user process needs
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Equipment reservations on SignupMonkey
Process
Expert process staff to guide you in process development
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Process Control on critical systems via Internship Program
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Qualified processes on many etch & dep. systems
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Starting Recipes and SPC Data regularly added to the NanoFab Wiki:
(Click on a bay to learn more)
User Supplies / Storage
Entryway
Hangers / Racks
Gowning Room